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Passivation of ferroelectric PZT capacitors using spin-on-glass

 

作者: J.R. Schifko,   E.A. Kneer,   D.P. Birnie Iii,   R.D. Schrimpf,   G. Teowee,  

 

期刊: Integrated Ferroelectrics  （Taylor Available online 1995）
卷期: Volume 6, issue 1-4  

页码: 121-128

 

ISSN:1058-4587

 

年代: 1995

 

DOI:10.1080/10584589508019358

 

出版商: Taylor & Francis Group

 

数据来源: Taylor

 

摘要:

Lead-Zirconate-Titanate (PZT) capacitors were built and tested. The devices consist of a monolithic Pt back electrode, ferroelectric PZT film deposited by the sol-gel method, a patterned Pt top electrode, and a Spin-On-Glass (SOG) passivation layer to protect as well as aid in flip chip bonding. Two commercial SOG solutions are used and compared in this paper, a phosphosilicate and a methylsiloxane.

 

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