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PC‐based digital apparatus with temperature compensation for measurement of thin films during deposition

 

作者: R. Generosi,   C. Barchesi,   M. Luce,   A. Cricenti,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1993)
卷期: Volume 64, issue 10  

页码: 2952-2953

 

ISSN:0034-6748

 

年代: 1993

 

DOI:10.1063/1.1144339

 

出版商: AIP

 

数据来源: AIP

 

摘要:

We present an apparatus for controlling the deposition of thin films. The apparatus is based on a quartz resonator whose frequency is controlled digitally by a computer. Temperature variations of the quartz during the evaporation process, attributed to the exothermic heat of condensation and radiation heating from the evaporation source, are compensated. A very stable deposition rate and a good film thickness evaluation are obtained.

 

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