PC‐based digital apparatus with temperature compensation for measurement of thin films during deposition
作者:
R. Generosi,
C. Barchesi,
M. Luce,
A. Cricenti,
期刊:
Review of Scientific Instruments
(AIP Available online 1993)
卷期:
Volume 64,
issue 10
页码: 2952-2953
ISSN:0034-6748
年代: 1993
DOI:10.1063/1.1144339
出版商: AIP
数据来源: AIP
摘要:
We present an apparatus for controlling the deposition of thin films. The apparatus is based on a quartz resonator whose frequency is controlled digitally by a computer. Temperature variations of the quartz during the evaporation process, attributed to the exothermic heat of condensation and radiation heating from the evaporation source, are compensated. A very stable deposition rate and a good film thickness evaluation are obtained.
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