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Differentially Pumped, Ultrahigh-Vacuum System Bakeable to 900 °C

 

作者: C. E. Blahnik,  

 

期刊: Journal of Vacuum Science and Technology  (AIP Available online 1967)
卷期: Volume 4, issue 6  

页码: 378-381

 

ISSN:0022-5355

 

年代: 1967

 

DOI:10.1116/1.1492566

 

出版商: American Vacuum Society

 

数据来源: AIP

 

摘要:

A differentially-pumped, ultrahigh-vacuum (uhv) system has been developed that is capable of 900 °C bakeout and can attain pressures below10−10Torr in as little as one hour, depending upon the thermal mass of the enclosed apparatus. This paper describes a two-part uhv system and some of the design and materials considerations for mechanical, electrical, and optical couplings through the vacuum walls. Suitable solutions to these and related problems are discussed.

 

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