Differentially Pumped, Ultrahigh-Vacuum System Bakeable to 900 °C
作者:
C. E. Blahnik,
期刊:
Journal of Vacuum Science and Technology
(AIP Available online 1967)
卷期:
Volume 4,
issue 6
页码: 378-381
ISSN:0022-5355
年代: 1967
DOI:10.1116/1.1492566
出版商: American Vacuum Society
数据来源: AIP
摘要:
A differentially-pumped, ultrahigh-vacuum (uhv) system has been developed that is capable of 900 °C bakeout and can attain pressures below10−10Torr in as little as one hour, depending upon the thermal mass of the enclosed apparatus. This paper describes a two-part uhv system and some of the design and materials considerations for mechanical, electrical, and optical couplings through the vacuum walls. Suitable solutions to these and related problems are discussed.
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