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Derivation and experimental verification of a particulate transport model for a glow discharge

 

作者: J. E. Daugherty,   D. B. Graves,  

 

期刊: Journal of Applied Physics  (AIP Available online 1995)
卷期: Volume 78, issue 4  

页码: 2279-2287

 

ISSN:0021-8979

 

年代: 1995

 

DOI:10.1063/1.360145

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The most important forces that influence the motion of particles in a glow discharge plasma are the electrostatic force, the ion drag force, the neutral drag force, thermophoresis, and gravity. In this article we present a transport model that predicts the distribution of particles in plasma reactors in terms of the fundamental forces that act on the particles. We compare the model predictions to experimental measurements of particle distributions in a rf parallel plate plasma reactor. ©1995 American Institute of Physics.

 

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