Derivation and experimental verification of a particulate transport model for a glow discharge
作者:
J. E. Daugherty,
D. B. Graves,
期刊:
Journal of Applied Physics
(AIP Available online 1995)
卷期:
Volume 78,
issue 4
页码: 2279-2287
ISSN:0021-8979
年代: 1995
DOI:10.1063/1.360145
出版商: AIP
数据来源: AIP
摘要:
The most important forces that influence the motion of particles in a glow discharge plasma are the electrostatic force, the ion drag force, the neutral drag force, thermophoresis, and gravity. In this article we present a transport model that predicts the distribution of particles in plasma reactors in terms of the fundamental forces that act on the particles. We compare the model predictions to experimental measurements of particle distributions in a rf parallel plate plasma reactor. ©1995 American Institute of Physics.
点击下载:
PDF
(1249KB)
返 回