Harmonic distortion in silicon condenser microphones
作者:
Michael Pedersen,
Wouter Olthuis,
Piet Bergveld,
期刊:
The Journal of the Acoustical Society of America
(AIP Available online 1997)
卷期:
Volume 102,
issue 3
页码: 1582-1587
ISSN:0001-4966
年代: 1997
DOI:10.1121/1.420070
出版商: Acoustical Society of America
数据来源: AIP
摘要:
The nonlinear effects causing distortion in condenser microphones are investigated and modeled with special attention paid to microphones made with silicon micromachining technology. A model of the distortion, based on the quasistatic properties, is described and solved numerically using finite differences. The results of the model show that the distortion is mainly caused by both the inverse relation between the microphone capacitance and the deflection of the diaphragm, as well as the nonlinear electrostatic forces generated by the applied dc bias voltage. The results of the model are compared with measurement results on a silicon/polyimide microphone, and good agreement is found.
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