Analysis of the thermal and acoustic properties of ion‐implanted diamondlike carbon films using the transient reflecting grating technique
作者:
Qing Shen,
Akira Harata,
Tsuguo Sawada,
期刊:
Journal of Applied Physics
(AIP Available online 1995)
卷期:
Volume 77,
issue 4
页码: 1488-1491
ISSN:0021-8979
年代: 1995
DOI:10.1063/1.358898
出版商: AIP
数据来源: AIP
摘要:
The transient reflecting grating (TRG) technique was applied to evaluate both nitrogen‐ion‐implanted and nonimplanted thin‐film coatings (thickness: 40 nm) of diamondlike carbon (DLC) on metallic multilayered substrates. Different TRG responses corresponding to the different nitrogen ion doses were observed. Hypersonic surface wave velocities as well as the thermal diffusivities were obtained with a variety of grating spacings. Effective elastic moduli (Young’s moduli) for the DLC coatings were given by using a theoretical treatment with a model. Nitrogen ion implantation hardened the DLC coating. ©1995 American Institute of Physics.
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