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GaAs/AIGaAs laser arrays with and without proton isolation

 

作者: Rong‐Yih Hwang,   Chien‐Ping Lee,   Tan‐Fu Lei,  

 

期刊: Journal of the Chinese Institute of Engineers  (Taylor Available online 1989)
卷期: Volume 12, issue 2  

页码: 255-261

 

ISSN:0253-3839

 

年代: 1989

 

DOI:10.1080/02533839.1989.9677157

 

出版商: Taylor & Francis Group

 

关键词: GaAs;AIGaAs;laser array

 

数据来源: Taylor

 

摘要:

Two types of GaAs/AIGaAs laser arrays, each consisting of five emitters and suitable for high power operations, have been fabricated and tested. They are easily fabricated, have high yield and deliver high power. The first array structure was fabricated using proton implantation to define the active lasing channels. Damage introduced by proton bombardment provides both electrical and optical confinement for the lasing channels. We have investigated the effect of heat treatment on the performance of these lasers and have found that the heat treated samples had a lower threshold current and higher quantum efficiency. For 400μm long devices, with uncoated facets, we have measured a threshold current of 200 mA and a peak power of 231 mW/facet. The highest external quantum efficiency is 60%. We have also fabricated laser arrays with a simple, self‐aligned, index guided ridge waveguide structures. We have obtain a pulsed output power of up to 551 mW/facet with a quantum efficiency of 37.4%. The typical threshold current is 370 mA.

 

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