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Lattice location of light implanted ions in Si and Ge after laser annealing

 

作者: G. Battaglini,   G.Della Mea,   G. Foti,  

 

期刊: Radiation Effects  (Taylor Available online 1980)
卷期: Volume 49, issue 1-3  

页码: 173-175

 

ISSN:0033-7579

 

年代: 1980

 

DOI:10.1080/00337578008243089

 

出版商: Taylor & Francis Group

 

数据来源: Taylor

 

 

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