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Imaging the irradiance distribution in the optical near field

 

作者: J. Aizenberg,   J. A. Rogers,   K. E. Paul,   G. M. Whitesides,  

 

期刊: Applied Physics Letters  (AIP Available online 1997)
卷期: Volume 71, issue 26  

页码: 3773-3775

 

ISSN:0003-6951

 

年代: 1997

 

DOI:10.1063/1.120502

 

出版商: AIP

 

数据来源: AIP

 

摘要:

This letter describes the use of a sensitive photoresist for direct imaging of optical intensity profiles in near-field photolithographic experiments. A comparison between experimental patterns in exposed, developed photoresist and calculated profiles of intensity shows that this procedure provides a reliable semiquantitative image of the irradiance distribution in the near field; experiment and theory correlate adequately. A potential use of the superficial diffraction contrast recorded in photoresist as the basis for a new method of the fabrication of nanostructures is discussed. ©1997 American Institute of Physics. 

 

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