Imaging the irradiance distribution in the optical near field
作者:
J. Aizenberg,
J. A. Rogers,
K. E. Paul,
G. M. Whitesides,
期刊:
Applied Physics Letters
(AIP Available online 1997)
卷期:
Volume 71,
issue 26
页码: 3773-3775
ISSN:0003-6951
年代: 1997
DOI:10.1063/1.120502
出版商: AIP
数据来源: AIP
摘要:
This letter describes the use of a sensitive photoresist for direct imaging of optical intensity profiles in near-field photolithographic experiments. A comparison between experimental patterns in exposed, developed photoresist and calculated profiles of intensity shows that this procedure provides a reliable semiquantitative image of the irradiance distribution in the near field; experiment and theory correlate adequately. A potential use of the superficial diffraction contrast recorded in photoresist as the basis for a new method of the fabrication of nanostructures is discussed. ©1997 American Institute of Physics.
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