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Generalized analysis of the use of induction loop probes in azimuthally symmetric inductively coupled plasma sources

 

作者: F. A. Haas,   N. St. J. Braithwaite,  

 

期刊: Journal of Applied Physics  (AIP Available online 1997)
卷期: Volume 82, issue 7  

页码: 3612-3614

 

ISSN:0021-8979

 

年代: 1997

 

DOI:10.1063/1.365680

 

出版商: AIP

 

数据来源: AIP

 

摘要:

UsingB-dot probes Meyer &etal; [J. Appl. Phys.79, 1298 (1996)] have described a method for calculating the azimuthal current, electric field, plasma permittivity, and electron density in a planar inductively coupled plasma source. They assume the phases associated with the time rate of change of the radial and axial field components to be the same. Furthermore, they restrict their analysis to the situation where the phase is independent of radius. We demonstrate that the phases for the two field directions are different. The subsequent modified forms for the plasma properties considered by Meyer &etal; are presented. We also show that their procedure can be extended to cover phases which are an arbitrary function of position, and for completeness, give forms for the generalized plasma properties. ©1997 American Institute of Physics.

 

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