Optimization and fabrication of grating beamsplitters in silicon nitride
作者:
M. R. Taghizadeh,
J. I. B. Wilson,
J. Turunen,
A. Vasara,
J. Westerholm,
期刊:
Applied Physics Letters
(AIP Available online 1989)
卷期:
Volume 54,
issue 16
页码: 1492-1494
ISSN:0003-6951
年代: 1989
DOI:10.1063/1.101331
出版商: AIP
数据来源: AIP
摘要:
We report for the first time the generation of optimized space‐invariant fan‐out elements, so‐called Dammann gratings [H. Dammann and K. Go¨rtler, Opt. Commun.3, 312 (1971)] in plasma silicon nitride. Diffraction efficiencies as high as 65% have been achieved. Using simulated annealing and the greedy algorithm, grating structures with fan‐out as large as 201×201 can readily be calculated. Low absorption and high optical quality together with its ease of structuring make silicon nitride an ideal medium for the construction of phase‐only optical elements.
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