Turbulent Free Convection in Czochralski Crystal Growth
作者:
W. R. Wilcox,
L. D. Fullmer,
期刊:
Journal of Applied Physics
(AIP Available online 1965)
卷期:
Volume 36,
issue 7
页码: 2201-2206
ISSN:0021-8979
年代: 1965
DOI:10.1063/1.1714450
出版商: AIP
数据来源: AIP
摘要:
Turbulent free convection of the melt during growth of calcium fluoride crystals by the Czochralski technique has been observed visually and by thermocouple measurement of the attendant temperature fluctuations. Such fluctuations, on the order of 30°C, were shown to cause growth rate fluctuations, and explain the origin of some of the striations previously observed in Czochralski‐grown semiconductor crystals. Effects of operating variables on the turbulence were measured. The best method for reducing or eliminating the turbulence was shown to be reduction of the vertical temperature gradient by use of reflectors or after‐heaters around the crystal.
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