A model of dc glow discharges with abnormal cathode fall
作者:
Karl H. Schoenbach,
Hao Chen,
G. Schaefer,
期刊:
Journal of Applied Physics
(AIP Available online 1990)
卷期:
Volume 67,
issue 1
页码: 154-162
ISSN:0021-8979
年代: 1990
DOI:10.1063/1.345294
出版商: AIP
数据来源: AIP
摘要:
A model for an abnormal glow discharge, including a self‐consistent analysis of the cathode fall, was developed. It combines microscopic particle simulation by means of Monte Carlo methods with a fluid model of the gas discharge. The model allows calculations of the steady‐state electrical field distribution, the charged‐particle densities, and the current densities along the axis of the discharge. The model was used to simulate a glow discharge in 80% He and 20% SF6at a pressure of 8 Torr with a current density of 1 A/cm2. The computed discharge voltage agrees well with measured values. The computer code can easily be modified to describe the charged‐particle densities and energies not only in the cathode fall region, but in any plasma boundary layer.
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