Electron spin resonance in argon‐ion‐implanted silicon
作者:
Keh‐Chang Chu,
Weiler R. Hurren,
Edward Hale,
John Reigle,
期刊:
Journal of Applied Physics
(AIP Available online 1973)
卷期:
Volume 44,
issue 9
页码: 4243-4243
ISSN:0021-8979
年代: 1973
DOI:10.1063/1.1662935
出版商: AIP
数据来源: AIP
摘要:
A new paramagnetic center withg= 2.0029 is observed, in bothn‐ andp‐type silicon after they are heavily implanted (higher than 1017ions/cm2) with 150‐keV argon ions.
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