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Electron spin resonance in argon‐ion‐implanted silicon

 

作者: Keh‐Chang Chu,   Weiler R. Hurren,   Edward Hale,   John Reigle,  

 

期刊: Journal of Applied Physics  (AIP Available online 1973)
卷期: Volume 44, issue 9  

页码: 4243-4243

 

ISSN:0021-8979

 

年代: 1973

 

DOI:10.1063/1.1662935

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A new paramagnetic center withg= 2.0029 is observed, in bothn‐ andp‐type silicon after they are heavily implanted (higher than 1017ions/cm2) with 150‐keV argon ions.

 

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