1 μm range comparative length measurement using a regular crystalline lattice and a dual tunneling unit scanning tunneling microscope
作者:
Masato Aketagawa,
Koji Takada,
Seiki Suzuki,
Shigetoshi Sasaki,
Hideaki Takahashi,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1997)
卷期:
Volume 15,
issue 3
页码: 574-578
ISSN:1071-1023
年代: 1997
DOI:10.1116/1.589294
出版商: American Vacuum Society
数据来源: AIP
摘要:
This article presents a potential image processing method for determining the in-plane geometrical distortion of a scanning tunneling microscope (STM) image and calibrating it using a regular crystalline lattice, and describes the results obtained in comparative length measurements in the range of about 1 μm using a regular crystalline lattice as a reference scale and a dual tunneling unit-STM (DTU-STM) as a detector. The method is based on two-dimensional fast Fourier transform analysis. The DTU-STM with oneX-Ystage and two tunneling units independently controlled in theZ-axis direction was utilized for comparative length measurement. To improve the measurement accuracy, the present method is used to process the raw images obtained from the DTU-STM. The results of experiments, in which the cleaved surface of highly oriented pyrolytic graphite is used as a reference scale for measurement of lengths on the order of 1 μm, demonstrate the feasibility of the present image processing method and the possibility of comparative length measurement with subnanometer resolution using the DTU-STM.
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