Depth profile of antimony implanted into diamond
作者:
G. Braunstein,
T. Bernstein,
U. Carsenty,
R. Kalish,
期刊:
Journal of Applied Physics
(AIP Available online 1979)
卷期:
Volume 50,
issue 9
页码: 5731-5735
ISSN:0021-8979
年代: 1979
DOI:10.1063/1.326710
出版商: AIP
数据来源: AIP
摘要:
The depth profiles of 350‐keV121Sb ions implanted at room temperature into diamonds were determined from neutron‐activation‐layer‐removal experiments. Profiles for both random and aligned (〈111〉) implantations were measured. The distribution of antimony ions implanted under channeling conditions was found to be centered somewhat deeper in the crystal than that of Sb ions implanted into a nonaligned diamond. The distribution tail extends in the case of channel implantation far into the crystal, well beyond the region of measurable damage.
点击下载:
PDF
(340KB)
返 回