Influence of gas added to the MEVVA discharge on the extracted ion beama)
作者:
P. Spa¨dtke,
H. Emig,
B. H. Wolf,
E. Oks,
期刊:
Review of Scientific Instruments
(AIP Available online 1994)
卷期:
Volume 65,
issue 10
页码: 3113-3118
ISSN:0034-6748
年代: 1994
DOI:10.1063/1.1144764
出版商: AIP
数据来源: AIP
摘要:
The presence of background gas in the discharge chamber of the metal vapor vacuum arc source influences the extracted beam. We have observed a strong influence of the background gas pressure in the arc region on the total extracted beam current and on the charge state distribution of the metallic ions. Different gases have been investigated together with different cathode materials. Up to 90% of the total beam current can be gaseous ions, depending on the arc and gas injection conditions.
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