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Insitumeasurement of AlAs and GaAs refractive index dispersion at epitaxial growth temperature

 

作者: V. Bardinal,   R. Legros,   C. Fontaine,  

 

期刊: Applied Physics Letters  (AIP Available online 1995)
卷期: Volume 67, issue 2  

页码: 244-246

 

ISSN:0003-6951

 

年代: 1995

 

DOI:10.1063/1.114681

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Insitumolecular beam epitaxy control of III–V optoelectronic device growth has been achieved by dynamic optical reflectometry with tunable excitation wavelength, through the use of a titanium:sapphire laser light source. This new multiwavelength reflectometry method was used to determine the values of the AlAs and GaAs refractive indices at growth temperature (600 °C). Index dispersion between 760 and 960 nm is presented and found to be in good agreement with the existing models. ©1995 American Institute of Physics.

 

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