Insitumeasurement of AlAs and GaAs refractive index dispersion at epitaxial growth temperature
作者:
V. Bardinal,
R. Legros,
C. Fontaine,
期刊:
Applied Physics Letters
(AIP Available online 1995)
卷期:
Volume 67,
issue 2
页码: 244-246
ISSN:0003-6951
年代: 1995
DOI:10.1063/1.114681
出版商: AIP
数据来源: AIP
摘要:
Insitumolecular beam epitaxy control of III–V optoelectronic device growth has been achieved by dynamic optical reflectometry with tunable excitation wavelength, through the use of a titanium:sapphire laser light source. This new multiwavelength reflectometry method was used to determine the values of the AlAs and GaAs refractive indices at growth temperature (600 °C). Index dispersion between 760 and 960 nm is presented and found to be in good agreement with the existing models. ©1995 American Institute of Physics.
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