Efficient liquid nitrogen supply system for the cooling shroud in a molecular beam epitaxy system
作者:
J. W. Cook,
J. F. Schetzina,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1994)
卷期:
Volume 12,
issue 2
页码: 1229-1231
ISSN:1071-1023
年代: 1994
DOI:10.1116/1.587051
出版商: American Vacuum Society
关键词: MOLECULAR BEAM EPITAXY;CRYOGENIC FLUIDS;NITROGEN;COOLING SYSTEMS;OPTIMAL CONTROL;DESIGN;OPERATION;TEMPERATURE CONTROL
数据来源: AIP
摘要:
The molecular beam epitaxy (MBE) process is generally surrounded by liquid nitrogen (LN2) cooled surfaces for optimum control of the environment in which the thin‐film deposition takes place. The design and operation of a LN2supply system for feeding the cryogenicly cooled surfaces in a MBE system is described here. The supply system is based on modification of a standard 50‐lLN2storage dewar. The reservoir gravity feeds liquid through a vacuum‐insulated line into the fill port of the MBE system. A solenoid‐operated vent valve activated by a temperature controller regulates the level of LN2in the MBE system. The LN2supply system is efficient and costs much less than other alternatives.
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