Synthesis of electron and ion optical columns
作者:
M. Szilagyi,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1991)
卷期:
Volume 9,
issue 5
页码: 2617-2621
ISSN:1071-1023
年代: 1991
DOI:10.1116/1.585659
出版商: American Vacuum Society
关键词: OPTIMIZATION;SYNTHESIS;ELECTROSTATIC LENSES;ELECTRODES;DESIGN;ELECTRON BEAMS;ION BEAMS
数据来源: AIP
摘要:
The basic ideas of a systematic procedure for the automatic design of electron and ion optical columns with given focusing and deflection properties and minimum aberrations are outlined. The concept of synthesis is thoroughly explained. Optical columns can be synthesized either from given elements or in their entirety. The procedures are based on two different approaches: (1) Seeking the appropriate potential distributions in the form of spline functions with the subsequent reconstruction of the electrodes. (2) Using anapriorigiven multipurpose multielectrode system, the electrode potentials of which are selected so that the given constraints are satisfied and the aberrations are minimized. The first practical calculations show quite promising results.
点击下载:
PDF
(504KB)
返 回