Experimental Apparatus and Procedures for Evaluating Parameters Affecting the Pumping Efficiency of a Cryogenically Cooled Plane
作者:
L. O. Mullen,
M. J. Hiza,
期刊:
Journal of Vacuum Science and Technology
(AIP Available online 1967)
卷期:
Volume 4,
issue 5
页码: 219-229
ISSN:0022-5355
年代: 1967
DOI:10.1116/1.1492549
出版商: American Vacuum Society
数据来源: AIP
摘要:
The collection efficiency of a plane acting as a pump in a vacuum system can be determined by measuring the rate at which molecules of a given species strike and the rate at which they return from that plane. This paper discusses an experimental vacuum system incorporating a movable partial-pressure analyzer capable of making such measurements. The experimental procedure discussed here provides a means for evaluating parameters affecting the pumping efficiency. Efficiency values obtained by the present approach are compared with values obtained from kinetic theory and from speed-factor measurements. The experimental data show that much of the deviation of reported pumping efficiencies can be explained by fragmentation of the test-gas molecules and by a pressure anisotropy in the test dome. A means of calibrating the analyzer with vapor-pressure data is also discussed.
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