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Experimental Apparatus and Procedures for Evaluating Parameters Affecting the Pumping Efficiency of a Cryogenically Cooled Plane

 

作者: L. O. Mullen,   M. J. Hiza,  

 

期刊: Journal of Vacuum Science and Technology  (AIP Available online 1967)
卷期: Volume 4, issue 5  

页码: 219-229

 

ISSN:0022-5355

 

年代: 1967

 

DOI:10.1116/1.1492549

 

出版商: American Vacuum Society

 

数据来源: AIP

 

摘要:

The collection efficiency of a plane acting as a pump in a vacuum system can be determined by measuring the rate at which molecules of a given species strike and the rate at which they return from that plane. This paper discusses an experimental vacuum system incorporating a movable partial-pressure analyzer capable of making such measurements. The experimental procedure discussed here provides a means for evaluating parameters affecting the pumping efficiency. Efficiency values obtained by the present approach are compared with values obtained from kinetic theory and from speed-factor measurements. The experimental data show that much of the deviation of reported pumping efficiencies can be explained by fragmentation of the test-gas molecules and by a pressure anisotropy in the test dome. A means of calibrating the analyzer with vapor-pressure data is also discussed.

 

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