首页   按字顺浏览 期刊浏览 卷期浏览 Elimination of gallium‐source related oval defects in molecular‐beam epitaxy of GaAs
Elimination of gallium‐source related oval defects in molecular‐beam epitaxy of GaAs

 

作者: Naresh Chand,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena  (AIP Available online 1990)
卷期: Volume 8, issue 2  

页码: 160-162

 

ISSN:0734-211X

 

年代: 1990

 

DOI:10.1116/1.584845

 

出版商: American Vacuum Society

 

关键词: GALLIUM ARSENIDES;MOLECULAR BEAM EPITAXY;DEFECTS;THICKNESS;VERY HIGH TEMPERATURE;ALUMINIUM ALLOYS;LAYERS

 

数据来源: AIP

 

摘要:

By evaporating gallium from apBN crucible which was previously used for evaporation of Al, ‘‘Ga‐spitting’’ and formation of Ga‐cell related oval defects have been eliminated in molecular‐beam epitaxy (MBE) of GaAs. MGE‐GaAs layers as thick as 20 μm were totally free from the Ga‐cell related oval defects. Remaining oval defects were those related to particulates and substrate contamination and their densities were 100 and 500 cm−2on 5 and 20‐μm thick layers of GaAs on GaAs substrates. However, these particulates related oval defects were hardly seen on up to 4‐μm thick GaAs layers grown on Si substrates. Aluminum wets and reacts with thepBN crucible when heated up to 1300 °C during evaporation of Al. Condensed gallium near the orifice wets the such aluminum treatedpBN surface and is not expected to spontaneously flow to the Ga charge in the form of droplets. As a result, Ga spitting does not occur and related oval defects do not form.

 

点击下载:  PDF (283KB)



返 回