Diffraction‐corrected subsurface imaging with a scanning laser acoustic microscope
作者:
Rolf K. Mueller,
William P. Robbins,
Z. Q. Zhou,
Eric Rudd,
期刊:
Applied Physics Letters
(AIP Available online 1986)
卷期:
Volume 48,
issue 23
页码: 1577-1578
ISSN:0003-6951
年代: 1986
DOI:10.1063/1.96873
出版商: AIP
数据来源: AIP
摘要:
A back projection (acoustic holography) algorithm has been developed and implemented on a computer‐controlled scanning laser acoustic microscope. The algorithm permits the reconstruction of clear well‐defined images of acoustic features which are far below (by tens of acoustic wavelengths) the laser‐scanned surface of the substrate. In essence, the algorithm corrects for the diffraction of the incident acoustic beam caused by the feature being insonified. Experimental results obtained using an electron microscope locator grid as the test feature and a compressional wave source of 100 MHz are presented.
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