Laser‐induced vapor deposition of silicon
作者:
M. Hanabusa,
Akira Namiki,
Keitaro Yoshihara,
期刊:
Applied Physics Letters
(AIP Available online 1979)
卷期:
Volume 35,
issue 8
页码: 626-627
ISSN:0003-6951
年代: 1979
DOI:10.1063/1.91230
出版商: AIP
数据来源: AIP
摘要:
Silicon films were deposited when silane was irradiated with a pulsed CO2laser. This laser‐induced vapor deposition occurs effectively when the laser is tuned to an absorption frequency of SiH4. Efficiency was so high that an unfocused beam of 1.3 MW/cm2sufficed. Any thermal effects are ruled out. Deposition is induced efficiently at gas pressures above 100 Torr, indicating that a collision‐aided process is involved.
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