A compact electron‐gun evaporation source for highly stable evaporation of refractory metals
作者:
Y. W. Beag,
K. Egawa,
R. Shimizu,
期刊:
Review of Scientific Instruments
(AIP Available online 1993)
卷期:
Volume 64,
issue 12
页码: 3647-3648
ISSN:0034-6748
年代: 1993
DOI:10.1063/1.1144245
出版商: AIP
数据来源: AIP
摘要:
An evaporation source of simple and compact construction was devised. This source is 20 mm in diameter and 30 mm long; is composed of a ring filament, control aperture, and disk‐shaped sample (source) and shield cover; and enables the evaporation of source material to be easily controlled at a constant rate without the use of a feedback system. This evaporation source ensures depositions at constant rates for several hours. Refractory metal films of several thousand angstroms thickness can be deposited onto substrates held 10 cm from the source. Typical performance characteristics in the application to Ti films are presented.
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