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Production of focused, low‐energy, hydrogen‐ion beams using a Colutron ion source

 

作者: Bruce L. Cain,   David N. Ruzic,   Robert Bastasz,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena  （AIP Available online 1988）
卷期: Volume 6, issue 1  

页码: 485-490

 

ISSN:0734-211X

 

年代: 1988

 

DOI:10.1116/1.584047

 

出版商: American Vacuum Society

 

关键词: ION BEAMS;HYDROGEN IONS 2 PLUS;BEAM OPTICS;BEAM PRODUCTION;ION SOURCES;DESIGN;BEAM CURRENTS

 

数据来源: AIP

 

摘要:

An ion beam decelerator for energies down to 5 eV is described. The decelerator is a Menzinger retardation system that has been modified according to the results of calculations using a ray tracing model to optimize lens geometry. Performance tests of the decelerator demonstrate that H+2beams with currents ≥20 nA can be obtained with a spot size adjustable from 0.5 to 10 mm using a beam raster system.

 

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