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Improved atomic force microscope using a laser diode interferometer

 

作者: Dror Sarid,   Paul Pax,   Leon Yi,   Sam Howells,   Mark Gallagher,   Ting Chen,   Virgil Elings,   Dan Bocek,  

 

期刊: Review of Scientific Instruments  （AIP Available online 1992）
卷期: Volume 63, issue 8  

页码: 3905-3908

 

ISSN:0034-6748

 

年代: 1992

 

DOI:10.1063/1.1143289

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The performance of an atomic force microscope using a laser diode interferometer has been improved to the point where its resolution is comparable to that of laser beam deflection systems. We describe the structure of this microscope, present a model that takes into account the main parameters associated with its operation, and demonstrate its sensitivity by showing images of a small area scan with atomic resolution as well as a large area scan in a stand‐alone configuration.

 

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