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Photothermal radiometric and spectroscopic measurements on silicon nitride thin films

 

作者: M. Nestoros,   A. Gutierrez-Llorente,   A. Othonos,   C. Christofides,   J. M. Martinez-Duart,  

 

期刊: Journal of Applied Physics  (AIP Available online 1997)
卷期: Volume 82, issue 12  

页码: 6215-6219

 

ISSN:0021-8979

 

年代: 1997

 

DOI:10.1063/1.366506

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Thin films of silicon nitride of various thicknesses, deposited by radio frequency magnetron sputtering on silicon quartz substrate, have been characterized by laser-induced and frequency scanned photothermal radiometry. Fourier transform infrared spectroscopy was also used to provide a qualitative description of the behavior of the films in the infrared range which shows favourable properties of these coatings to be used in passive cooling applications. ©1997 American Institute of Physics.

 

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