Workpiece charging in electron beam lithography
作者:
J. Ingino,
G. Owen,
C. N. Berglund,
R. Browning,
R. F. W. Pease,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1994)
卷期:
Volume 12,
issue 3
页码: 1367-1371
ISSN:1071-1023
年代: 1994
DOI:10.1116/1.587300
出版商: American Vacuum Society
关键词: LITHOGRAPHY;ELECTRON BEAMS;MASKING;SURFACE POTENTIAL;POSITIONING;ERRORS;ELECTRIC CHARGES
数据来源: AIP
摘要:
A major contribution to total overlay error can be pattern placement imprecision due to charging of the workpiece in electron beam lithography for mask manufacture. A first‐generation, worst‐case model is presented which indicates that an electron can experience quite a large placement error for a modest workpiece surface potential (100 nm/V). This model also predicts that the amount of error is proportional to the working distance. A novel method which measures the surface potential, to within 50 mV, is also presented. Results indicate that when exposed with 10 kV electrons the surface potential of 3000 Å PMMA on silicon is 1.5 V while that of 4000 Å SAL‐601 on chrome on quartz is 0.5 V. The discharging time for both samples was found to be of the same order as the write time for a typical mask.
点击下载:
PDF
(362KB)
返 回