Manipulation of nucleation sites in solid‐state Si crystallization
作者:
Hideya Kumomi,
Takao Yonehara,
Takashi Noma,
期刊:
Applied Physics Letters
(AIP Available online 1991)
卷期:
Volume 59,
issue 27
页码: 3565-3567
ISSN:0003-6951
年代: 1991
DOI:10.1063/1.105633
出版商: AIP
数据来源: AIP
摘要:
Single grains of Si crystal are manipulated, for the first time, in solid‐state crystallization of amorphous Si films. The artificial nucleation sites are introduced by employing the self‐ion implantation. The nucleation and growth, during the subsequent thermal annealing strongly depends on the ion dose and energy. Preferential growth of the single nucleus takes place exclusively at each site and continues to propagate over them. Consequently, the location of grains is controlled, and the size distribution is remarkably shrunken in contrast to the films crystallized by random nucleation.
点击下载:
PDF
(491KB)
返 回