A dynamic model for analyzing piezoelectric stepmotors
作者:
Yang Sheng Yuan,
Huang Wen Hao,
He Tian,
期刊:
Review of Scientific Instruments
(AIP Available online 1994)
卷期:
Volume 65,
issue 5
页码: 1566-1569
ISSN:0034-6748
年代: 1994
DOI:10.1063/1.1145213
出版商: AIP
数据来源: AIP
摘要:
A new dynamic model is developed for analyzing the dynamic process of piezoelectric stepmotors. In this model the voltage applied to the piezoelectric stepmotor is equivalent to the force acting on the end of the piezoelectric stepmotor. The model is simple and convenient for applications. As an example, a model of analyzing the rotatable sample stage is presented. The theoretical results are in good agreement with the experimental results. The structural damping of the piezoelectric material is also discussed.
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