Nonlinear piezoresistance effects in silicon
作者:
Kazunori Matsuda,
Katuhisa Suzuki,
Kazuhisa Yamamura,
Yozo Kanda,
期刊:
Journal of Applied Physics
(AIP Available online 1993)
卷期:
Volume 73,
issue 4
页码: 1838-1847
ISSN:0021-8979
年代: 1993
DOI:10.1063/1.353169
出版商: AIP
数据来源: AIP
摘要:
Nonlinearity of the piezoresistance effects inp‐ andn‐type silicon was measured at room temperature for three surface impurity concentrations and for three crystallographic orientations <100≳, <110≳, and <1¯1¯2≳. Piezoresistance coefficients up to third order in stress were obtained experimentally. Uniaxial stresses up to about 174 MPa were applied with currents flowing either parallel (longitudinal configuration) or perpendicular (transverse configuration) to them. A complete set of nine independent second‐order tensor components was determined. The second‐order piezoresistance coefficients in various configurations of uniaxial stress, current, and crystallographic orientation were calculated by the sixth rank tensor transformation. The nonlinear piezoresistance effect inn‐type silicon was discussed with the many‐valley model.
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