The mechanism of texture formation during film growth: The roles of preferential sputtering and shadowing
作者:
Feng Ying,
Richard W. Smith,
David J. Srolovitz,
期刊:
Applied Physics Letters
(AIP Available online 1996)
卷期:
Volume 69,
issue 20
页码: 3007-3009
ISSN:0003-6951
年代: 1996
DOI:10.1063/1.116821
出版商: AIP
数据来源: AIP
摘要:
Nonequilibrium molecular dynamics simulations have been employed to develop a mechanistic model for the development of an out‐of‐plane (fiber) texture in polycrystalline thin films. The depositing atoms preferentially sputter film atoms from grains with high surface energies. As the film grows, an atomic shadowing mechanism leads to the lateral growth of the grains with a height advantage—eventually leading to the occlusion of randomly oriented grains. ©1996 American Institute of Physics.
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