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The mechanism of texture formation during film growth: The roles of preferential sputtering and shadowing

 

作者: Feng Ying,   Richard W. Smith,   David J. Srolovitz,  

 

期刊: Applied Physics Letters  (AIP Available online 1996)
卷期: Volume 69, issue 20  

页码: 3007-3009

 

ISSN:0003-6951

 

年代: 1996

 

DOI:10.1063/1.116821

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Nonequilibrium molecular dynamics simulations have been employed to develop a mechanistic model for the development of an out‐of‐plane (fiber) texture in polycrystalline thin films. The depositing atoms preferentially sputter film atoms from grains with high surface energies. As the film grows, an atomic shadowing mechanism leads to the lateral growth of the grains with a height advantage—eventually leading to the occlusion of randomly oriented grains. ©1996 American Institute of Physics.

 

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