Location of impurities in compounds by asymmetry of channeling dips
作者:
J. U. Andersen,
N. G. Chechenin,
Zhang Zu Hua,
期刊:
Applied Physics Letters
(AIP Available online 1981)
卷期:
Volume 39,
issue 9
页码: 758-760
ISSN:0003-6951
年代: 1981
DOI:10.1063/1.92844
出版商: AIP
数据来源: AIP
摘要:
The location of substitutional impurities in GaP (Sb and In) has been investigated by channeling. The sites may be determined from the width of 〈110〉 backscattering dips, but a new technique based on asymmetry of the channeling dips is developed, which appears to be more powerful for compounds with ZnS structure. It requires smaller ion doses and may be applied also to compounds such as GaAs with nearly equal atomic number of the compound constituents. The technique may also be applied to determine the stacking order in a 〈111〉 direction of such compounds.
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