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Electron emission from boron nitride coated Si field emitters

 

作者: Takashi Sugino,   Seiji Kawasaki,   Kazuhiko Tanioka,   Junji Shirafuji,  

 

期刊: Applied Physics Letters  (AIP Available online 1997)
卷期: Volume 71, issue 18  

页码: 2704-2706

 

ISSN:0003-6951

 

年代: 1997

 

DOI:10.1063/1.120183

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Electron emission characteristics of sulfur (S)-doped boron nitride (BN) films synthesized by plasma-assisted chemical vapor deposition (PACVD) are investigated. The BN film consists of hexagonal grains of 3 nm in size. The energy gap is estimated to be as wide as 6.0 eV from ultraviolet-visible optical transmission measurement. The electrical resistivity is reduced to4.9×102 &OHgr; cm.Si tip field emitters coated with the BN film are fabricated. The electron emission occurs at an electric field as low as 6 V/&mgr;m, while a high electric field of 20 V/&mgr;m is needed to emit electrons from the Si tip array without BN coating. It is deduced that the tunneling barrier height of 0.1 eV exists at the surface of the BN film. ©1997 American Institute of Physics.

 

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