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Displacement damage equivalent to dose in silicon devices

 

作者: C. J. Dale,   P. W. Marshall,   G. P. Summers,   E. A. Wolicki,   E. A. Burke,  

 

期刊: Applied Physics Letters  (AIP Available online 1989)
卷期: Volume 54, issue 5  

页码: 451-453

 

ISSN:0003-6951

 

年代: 1989

 

DOI:10.1063/1.100949

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Particle‐induced displacement damage effects in silicon bipolar transistors, including those due to electrons and to fission neutrons, are correlated on the basis of the nonionizing energy deposited in the lattice by the primary knock‐on atoms. Deviations from linearity between damage effects and energy deposition are in a direction opposite to those expected from defect cluster models but can be accounted for in terms of the fraction of vacancy‐interstitial pairs initially formed that survive recombination.

 

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