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Calibration of scanning tunneling microscope transducers using optical beam deflection

 

作者: G. C. Wetsel,   S. E. McBride,   R. J. Warmack,   B. Van de Sande,  

 

期刊: Applied Physics Letters  (AIP Available online 1989)
卷期: Volume 55, issue 6  

页码: 528-530

 

ISSN:0003-6951

 

年代: 1989

 

DOI:10.1063/1.101868

 

出版商: AIP

 

数据来源: AIP

 

摘要:

An accurate, sensitive, easily implemented method of calibration of the elastic displacement of piezoelectric transducers used in scanning tunneling microscopes has been developed. The axial displacement for both static and harmonic excitation has been measured using laser beam deflection amplified by an optical magnification system. For harmonic excitation where lock‐in amplifier detection can be utilized, displacements as small as 0.03 A˚ have been measured. Measurements on PZT‐5H and PZT‐8 transducers over a range of five orders of magnitude in applied voltage demonstrate the power of the method in calibration of displacements from the subangstrom to the nonlinear region with an uncertainty of about 4%.

 

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