Platinum metal etching in a microwave oxygen plasma
作者:
C. H. Chou,
J. Phillips,
期刊:
Journal of Applied Physics
(AIP Available online 1990)
卷期:
Volume 68,
issue 5
页码: 2415-2423
ISSN:0021-8979
年代: 1990
DOI:10.1063/1.346501
出版商: AIP
数据来源: AIP
摘要:
As part of a general effort to understand the etching of metals in both plasma and chemical systems the etching of platinum foils in an oxygen plasma generated in a flow‐type microwave system was studied. It was found that very rapid etching (∼ 6 A˚/s) took place even at low power inputs (200 W). The principal plasma parameters, including oxygen atom concentration, ion concentration, and electron temperature, were measured as a function of distance below the microwave coupler. These were correlated to the rate of foil etching, which decreased with increasing distance from the coupler. On the basis of these correlations a simple mechanistic model was formulated. Etching of platinum in an oxygen plasma jet results from the concomitant action of oxygen atoms and high energy electrons.
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