A Poisson solver for spreading resistance analysis
作者:
D. H. Dickey,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1992)
卷期:
Volume 10,
issue 1
页码: 438-441
ISSN:1071-1023
年代: 1992
DOI:10.1116/1.586371
出版商: American Vacuum Society
关键词: DOPING PROFILES;CARRIER DENSITY;POISSON EQUATION;RECURSION RELATIONS;BOUNDARY CONDITIONS;NUMERICAL SOLUTION;SEMICONDUCTOR MATERIALS
数据来源: AIP
摘要:
It has become evident in recent years that carrier concentration profiles measured on beveled surfaces with a spreading resistance probe might not accurately reflect the associated vertical dopant profiles. Carrier spilling, even in the absence of surface states, can move an on‐bevel junction 1/2 micron or more from its metallurgical depth. This article describes a Poisson solver which we have developed for use in spreading resistance data reduction. It allows the calculation of dopant profiles from measured on‐bevel profiles. Examples from a variety of structures are given.
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