Reignition Voltage in a High‐Pressure rf Discharge
作者:
H. A. Schwab,
R. F. Hotz,
期刊:
Journal of Applied Physics
(AIP Available online 1970)
卷期:
Volume 41,
issue 4
页码: 1503-1507
ISSN:0021-8979
年代: 1970
DOI:10.1063/1.1659064
出版商: AIP
数据来源: AIP
摘要:
rf glow discharges at high pressure are quenched after every half‐cycle and must be reignited in the following half‐cycle. The reignition voltageViwas investigated experimentally in the frequency range 0.15–1 MHz. It was found thatVigrows with electrode distancedup to a certain valuedmax. Atdmax,Videcreases distinctly and stays low for a further increase ofd. The explanation given for this effect is that at relatively small electrode distances all charge carriers can be removed from the discharge gap before reignition and breakdown must take place without support from space charges. For larged, however, the charge carriers cannot travel through the whole gap in the given time. Some remain in the gap and facilitate breakdown. Therefore a smaller value ofVican reignite a long gap. The measured frequency response ofVisupports this explanation. A theoretical estimate of values ofdmaxis within a factor of 1.6 of experimental values.
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