An electrical power source can be made by exposing ap‐njunction to radioactivity or light, so that the junction field separates electron‐hole pairs produced by the radiation. Expressions for maximum power, optimum load resistance, and efficiency are derived from an equivalent circuit and rectification theory. Power and efficiency increase with source currentIgof separated charges and zero‐bias junction resistance.Igincreases with energy and intensity of radiation, but is limited by self‐absorption in the radioactive isotopes. Estimates of attainable power and efficiency for silicon cells are 3·10−3watt cm−2and 15 percent for solar radiation, averaged, allowing for night, weather, and varying angle of incidence; and 3·10−4watt cm−2and 8 percent, for beta radiation from Sr90&sngbnd;Y90of activity 32 Curie/g. However, lattice defects produced by Sr90&sngbnd;Y90beta radiation impair cell performance by increasing electron‐hole recombination. A theoretical estimate of threshold energy for radiation damage in silicon is about 0.3 Mev, about half the experimental value reported for germanium. Avoiding radiation damage by annealing, by absorbers, and by use of less energetic isotopes is discussed. The Y90beta spectrum is given; it is used in estimating damage rates in germanium, which are high, and efficiencies obtainable with absorbers, which are low. Theory and experiment are compared for Sr90&sngbnd;Y90cells of silicon and of germanium.