Molybdenum‐silicon multilayer monochromator for the extreme ultraviolet
作者:
Troy W. Barbee,
Piero Pianetta,
Renato Redaelli,
Roman Tatchyn,
Troy W. Barbee,
期刊:
Applied Physics Letters
(AIP Available online 1987)
卷期:
Volume 50,
issue 25
页码: 1841-1843
ISSN:0003-6951
年代: 1987
DOI:10.1063/1.97714
出版商: AIP
数据来源: AIP
摘要:
A two‐element molybdenum‐silicon multilayer monochromator has been tested in the energy range 60–110 eV on a differentially pumped bending magnet beamline having a high‐energy cutoff of 3.5 keV at the Stanford Synchrotron Radiation Laboratory. The multilayer structures were sputter deposited onto 5‐cm‐diam (111) single‐crystal silicon and contained 20 molybdenum layers (4.93 nm thick) separated by amorphous silicon layers (7.8 nm thick). A 1200 l/mm gold transmission grating was used to independently measure the wavelength passed by the monochromator. The AlL2,3absorption edge jump was also measured using the monochromator. These experimental results are compared to model calculations for both the synchrotron source‐monochromator and the synchrotron source‐monochromator‐Al filter configurations and excellent agreement is shown.
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