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Molybdenum‐silicon multilayer monochromator for the extreme ultraviolet

 

作者: Troy W. Barbee,   Piero Pianetta,   Renato Redaelli,   Roman Tatchyn,   Troy W. Barbee,  

 

期刊: Applied Physics Letters  (AIP Available online 1987)
卷期: Volume 50, issue 25  

页码: 1841-1843

 

ISSN:0003-6951

 

年代: 1987

 

DOI:10.1063/1.97714

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A two‐element molybdenum‐silicon multilayer monochromator has been tested in the energy range 60–110 eV on a differentially pumped bending magnet beamline having a high‐energy cutoff of 3.5 keV at the Stanford Synchrotron Radiation Laboratory. The multilayer structures were sputter deposited onto 5‐cm‐diam (111) single‐crystal silicon and contained 20 molybdenum layers (4.93 nm thick) separated by amorphous silicon layers (7.8 nm thick). A 1200 l/mm gold transmission grating was used to independently measure the wavelength passed by the monochromator. The AlL2,3absorption edge jump was also measured using the monochromator. These experimental results are compared to model calculations for both the synchrotron source‐monochromator and the synchrotron source‐monochromator‐Al filter configurations and excellent agreement is shown.

 

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