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Interfacial defects in silicides on Si(100): ‘‘Coreless defects,’’ 1/12⟨111⟩ dislocations, and twinning mechanisms

 

作者: D. J. Eaglesham,   R. T. Tung,   J. P. Sullivan,   F. Schrey,  

 

期刊: Journal of Applied Physics  (AIP Available online 1993)
卷期: Volume 73, issue 8  

页码: 4064-4066

 

ISSN:0021-8979

 

年代: 1993

 

DOI:10.1063/1.352829

 

出版商: AIP

 

数据来源: AIP

 

摘要:

‘‘Coreless defects’’ are one of the long‐standing surprises of silicide epitaxy on Si. For symmetry reasons a NiSi2or CoSi2film cannot grow over a step on Si(100), but must incorporate a dislocation; apparently, however, very thin films avoided this dislocation by introducing a trench through the silicide, the coreless defect. Here we use high‐resolution microscopy, electron diffraction and dark‐field imaging to show that these defects are in fact microtwins ≊4 atomic planes thick. The twins are highly unusual in that they follow curved lines, apparently dictated by steps at the interface. A mechanism for the formation of these curved twin defects by repeated formation of a 1/12⟨111⟩ interfacial partial at steps is postulated.

 

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