Interfacial defects in silicides on Si(100): ‘‘Coreless defects,’’ 1/12〈111〉 dislocations, and twinning mechanisms
作者:
D. J. Eaglesham,
R. T. Tung,
J. P. Sullivan,
F. Schrey,
期刊:
Journal of Applied Physics
(AIP Available online 1993)
卷期:
Volume 73,
issue 8
页码: 4064-4066
ISSN:0021-8979
年代: 1993
DOI:10.1063/1.352829
出版商: AIP
数据来源: AIP
摘要:
‘‘Coreless defects’’ are one of the long‐standing surprises of silicide epitaxy on Si. For symmetry reasons a NiSi2or CoSi2film cannot grow over a step on Si(100), but must incorporate a dislocation; apparently, however, very thin films avoided this dislocation by introducing a trench through the silicide, the coreless defect. Here we use high‐resolution microscopy, electron diffraction and dark‐field imaging to show that these defects are in fact microtwins ≊4 atomic planes thick. The twins are highly unusual in that they follow curved lines, apparently dictated by steps at the interface. A mechanism for the formation of these curved twin defects by repeated formation of a 1/12〈111〉 interfacial partial at steps is postulated.
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