AbstractThe STM tip shape was found to change when nanofabrication using a scanning tunnelling microscope (STM) was attempted by applying voltage pulses between the tip and the sample. This change, which is considered to be caused by the voltage pulses, was studied systematically to investigate the thermal contribution to nanofabrication using STM tips. The tips become easily damaged as the pulse amplitude and pulse width increase or the tunnelling gap decreases. Thermal reaction, including thermochemical reaction, is considered to play an important role in such nanofabrication.