Emission on theI2(D′→A′),XeI(B2&Sgr;1/2+→X2&Sgr;1/2+)and XeO(2 3&Pgr;→1 3&Pgr;)bands, peaking in the ultraviolet at 342, 253 and 238 nm, respectively, has been generated on a continuous basis in a microdischarge with a static gas fill. Discharges are produced inKr/I2,Xe/I2,orXe/O2gas mixtures by cylindrical devices 400 &mgr;m in diameter and fabricated in silicon. Rare-gas–halide and –oxide microdischarge lamps are attractive ultraviolet or vacuum ultraviolet sources and XeI, in particular, appears to be a potential replacement for Hg resonance line radiation (253.7 nm). ©1998 American Institute of Physics.