Vapor‐deposited thin films of YBa2Cu3Oywith complete superconducting transition temperatures as high as about 90.8 K have been fabricated using a triple e‐beam vapor deposition system. Resistive transition widths of about 0.7 K have been observed. While a variety of substrates have been used, the highest Tcand Jcare generally obtained on single crystal SrTiO3. Lithographic patterning of the films has been accomplished, producing the first superconducting electron devices (DC SQUIDs) operating in the liquid nitrogen temperature range, up to about 78 K.