The influence of the electrodes on the dielectric behavior and especially on the leakage behavior of SrTiO3thin films was investigated by impedance analysis. Based on measurements on thin films with different electrode materials the work function of these materials was found to determine the leakage currents. The main conduction mechanism is thermionic emission of electrons from the cathode into the SrTiO3thin film. The current–voltage characteristics are influenced by the Schottky effect. ©1995 American Institute of Physics.