Development of turbo‐viscous pump with ceramic rotor assembly and oil‐free driving unit
作者:
Y. Murakami,
T. Abe,
H. Ohsawa,
S. Hata,
期刊:
Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films
(AIP Available online 1991)
卷期:
Volume 9,
issue 3
页码: 2053-2057
ISSN:0734-2101
年代: 1991
DOI:10.1116/1.577454
出版商: American Vacuum Society
关键词: VACUUM PUMPS;ROTORS;MEDIUM VACUUM;CERAMICS;DESIGN
数据来源: AIP
摘要:
In order to establish a dynamic pumping system for fusion reactors and other advanced vacuum devices, a new type of roughing pump named turbo‐viscous pump has been developed. The construction of the pump features a multistage ceramic (silicon nitride) rotor assembly and an oil‐free driving unit. The rotor assembly has parallel rotor disks, between which project stator disks from the outer casing with rotor‐stator clearances<100 μm, and a shaft with gas turbine blades. Spiral grooves are cut on either side of the rotor or stator disk of each stage, each of them starting near the center (or at the periphery) and ending at the periphery (or near the center). The pump shaft is supported by gas bearings and is driven by gas impulse turbines at ∼25 000 rpm. No lubricating or cooling oil is used. The turbo‐viscous pump works in a wide pressure range from atmospheric pressure to 10−3Pa. The pumping speed and ultimate pressure attained so far are 0.28 m3/min (at inlet pressures between 10−1and 102Pa) and 1×10−3Pa, respectively.
点击下载:
PDF
(421KB)
返 回