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Growth of vertical-cavity surface-emitting laser structures on GaAs (311)B substrates by metalorganic chemical vapor deposition

 

作者: K. Tateno,   Y. Ohiso,   C. Amano,   A. Wakatsuki,   T. Kurokawa,  

 

期刊: Applied Physics Letters  (AIP Available online 1997)
卷期: Volume 70, issue 25  

页码: 3395-3397

 

ISSN:0003-6951

 

年代: 1997

 

DOI:10.1063/1.119182

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Vertical-cavity surface-emitting laser (VCSEL) structures have been grown on GaAs (311)B substrates by metalorganic chemical vapor deposition. C-doped GaAs and AlAs layers with smooth surface morphology and a hole concentration of1018 cm−3were obtained by optimizing the growth conditions; these conditions contributed to high-qualityp-type distributed Bragg reflectors (DBRs). The devices on the (311)B substrates exhibited a threshold current of 9.6 mA, voltage of 2.1 V, and maximum power of 4.1 mW at a 20 &mgr;m &fgr; size; these characteristics are similar to those obtained on (100) substrates. The polarization was aligned to [2¯33¯]. ©1997 American Institute of Physics.

 

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