Lead zirconate titanate (PZT) thin films were prepared by reactive coevaporation with high-concentration ozone. PZT thin films that demonstrate the highest charge storage density (280 fC/&mgr;m2at 1.5 V for 75-nm-thick film) yet reported have been fabricated. No fatigue was observed after 1011polarization switching cycles even though a Pt electrode is used. A low leakage current of <10−7A/cm2at 1.5 V was attained. These PZT films are promising candidates of an alternative capacitor dielectric for dynamic random access memory (DRAM) and ferroelectric nonvolatile memories. ©1997 American Institute of Physics.